- dry etch technique
- Техника: технология сухого травления
Универсальный англо-русский словарь. Академик.ру. 2011.
Универсальный англо-русский словарь. Академик.ру. 2011.
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Semiconductor device fabrication — Semiconductor manufacturing processes 10 µm 1971 3 µm 1975 1.5 µm 1982 … Wikipedia
Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of … Wikipedia
Surface micromachining — is a process used to produce micromachinery or MEMS.Unlike Bulk micromachining, where a silicon substrate (wafer) is selectively etched to produce structures, surface micromachining is based on the deposition and etching of different structural… … Wikipedia
Dental composite — Dental composites. Dental composite resins are types of synthetic resins which are used in dentistry as restorative material or adhesives. Synthetic resins evolved as restorative materials since they were insoluble, aesthetic, insensitive to… … Wikipedia
Sublimation (chemistry) — Sublimation of an element or compound is a transition from the solid to gas phase with no intermediate liquid stage. Sublimation is an endothermic phase transition that occurs at temperatures and pressures below the triple point (see phase… … Wikipedia
Shallow trench isolation — (STI), also known as Box Isolation Technique , is an integrated circuit feature which prevents electrical current leakage between adjacent semiconductor device components. STI is generally used on CMOS process technology nodes of 250 nanometers… … Wikipedia
printmaking — /print may king/, n. the art or technique of making prints, esp. as practiced in engraving, etching, drypoint, woodcut or serigraphy. [1925 30; PRINT + MAKING] * * * Art form consisting of the production of images, usually on paper but… … Universalium
Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of … Wikipedia
Double patterning — is a class of technologies developed for photolithography to enhance the feature density. For the semiconductor industry, double patterning is the only lithography technique to be used for the 32 nm and 22 nm half pitch nodes in 2008 2009 and… … Wikipedia
Etching — For other uses of etch or etching, see Etching (disambiguation), for the history of the method, see old master prints. The Soldier and his Wife. Etching by Daniel Hopfer, who is believed to have been the first to apply the technique to… … Wikipedia